| 000 | 00667nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2010##################000#0#eng## | ||
| 020 | _a9780819481436 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 GEO | ||
| 100 | _aGeorge, Thomas | ||
| 245 |
_aMicro- and nanotechnology sensors, systems, and applications II 5-9 April 2010, Orlando, Florida, United States _cThomas George,M.Saif Islam |
||
| 260 |
_aBellingham, WA _bSPIE _c2010 |
||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aNanoelectromechanical systems | ||
| 650 | _aNanophotonics | ||
| 700 | _aIslam, Saif M | ||
| 990 | _ae9d7f84dac10000c5172abfd795449ed | ||
| 991 | _a377059 | ||
| 999 |
_c9943 _d9943 |
||