000 00582nam a2200205Ia 4500
008 191130s2009##################000#0#eng##
020 _a9788126517909
040 _aACL
_cACL
082 _a621.395 GHA
100 _aGhandhi, Sorab K
245 _aVLSI fabrication principles : silicon and gallium arsenide
_cSorab K. Ghandhi
250 _a2nd ed
260 _aNew Delhi
_bWiley India
_c2009
300 _axxiv, 834p. : ill. ; 23 cm
500 _aIncludes index
650 _aFabrication
990 _a801a5f94ac10000c4ca0a94260686471
991 _a193520
999 _c90073
_d90073