| 000 | 00971nam a2200241Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2004##################000#0#eng## | ||
| 020 | _a9780819452528 | ||
| 022 | _a2004301519 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 JAN | ||
| 245 |
_aMEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA _cSiegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering |
||
| 260 |
_aBellingham, WA _bSPIE _cc2004 |
||
| 300 | _axxxi, 232 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and author index | ||
| 650 | _aMicroelectromechanical systems - Congresses | ||
| 650 | _aOptoelectronic devices - Congresses | ||
| 700 | _aHenning, Albert Karl | ||
| 700 | _aJanson, Siegfried W | ||
| 710 | _aSociety of Photo-optical Instrumentation Engineers | ||
| 990 | _ade482e8eac10000c794adf3c45f2677a | ||
| 991 | _a370001 | ||
| 999 |
_c8696 _d8696 |
||