| 000 | 01264nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2006##################000#0#eng## | ||
| 020 | _a9780819462428 | ||
| 022 | _a2006298292 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621 URE | ||
| 245 |
_aMEMS, MOEMS, and micromachining II : 3-4 April, 2006, Strasbourg, France _cHakan Ürey, Ayman El-Fatatry, chairs/editors ; sponsored by SPIE Europe ; cosponsored by Conseil General Du Bas-Rhin (France) ... [et al.] ; cooperating organizations CNOP--Comité National d'Optique et de Photonique (France) ... [et al.] ; published by SPIE--the International Society for Optical Engineering |
||
| 260 |
_aBellingham, WA _bSPIE _c2006 |
||
| 300 | _a1 v. (various pagings) : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and author index | ||
| 650 | _aMicroelectromechanical systems - Congresses | ||
| 650 | _aMicromachining - Congresses | ||
| 650 | _aOptoelectronic devices - Congresses | ||
| 700 | _aEl-Fatatry, Ayman | ||
| 700 | _aUrey, Hakan | ||
| 710 | _aBas-Rhin (France). Conseil général, Comité national d'optique et de photonique (France), Society of Photo-optical Instrumentation Engineers, SPIE Europe | ||
| 990 | _af3eabaadac10000c2827cb1f095a9922 | ||
| 991 | _a381539 | ||
| 999 |
_c8694 _d8694 |
||