| 000 | 01432nam a2200265Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2001##################000#0#eng## | ||
| 020 | _a9780819442871 | ||
| 022 | _a2001279011 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 HEL | ||
| 245 |
_aMEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA _cHenry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.] |
||
| 260 |
_aBellingham, WA _bSPIE _c2001 |
||
| 300 | _axxvii, 190 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aManufacturing processes - Congresses | ||
| 650 | _aMicroelectromechanical systems - Design and construction - Congresses | ||
| 650 | _aMicroelectromechanical systems - Industrial applications - Congresses | ||
| 700 | _aHelvajian, Henry | ||
| 700 | _aJanson, Siegfried W | ||
| 700 | _aLärmer, Franz | ||
| 710 | _aSemiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency | ||
| 990 | _aea404497ac10000c6873059df54e479c | ||
| 991 | _a377445 | ||
| 999 |
_c8690 _d8690 |
||