| 000 | 00611nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2003##################000#0#eng## | ||
| 020 | _a9783908450788 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.38152 HEY | ||
| 245 |
_aUltra clean processing of silicon surfaces V _cedited by Marc Heyns,Paul Mertens and Marc Meuris |
||
| 260 |
_aSwitzerland _bScitec Publications _c2003 |
||
| 300 | _axiii, 311p. ; 25 cm | ||
| 650 | _aClean processing | ||
| 700 | _aHeyns, Marc | ||
| 700 | _aMertens, Paul | ||
| 700 | _aMeuris, Marc | ||
| 990 | _a3cef57f0ac10000c363def33330691c9 | ||
| 991 | _a156663 | ||
| 999 |
_c84727 _d84727 |
||