| 000 | 00731nam a2200241Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2005##################000#0#eng## | ||
| 020 | _a9780824725679 | ||
| 022 | _a2004058221 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.92 LIA | ||
| 100 | _aLiang, Hong | ||
| 245 |
_aTribology in chemical-mechanical planarization _cHong Liang, David Craven |
||
| 260 |
_aBoca Raton, FL _bTaylor & Francis _c2005 |
||
| 300 | _a185 p. : ill. ; 25 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aChemical mechanical planarization | ||
| 650 | _aGrinding and polishing | ||
| 650 | _aTribology | ||
| 700 | _aCraven, David R | ||
| 990 | _a95396d6bac10000c296346cda4c1ee20 | ||
| 991 | _a206398 | ||
| 999 |
_c83093 _d83093 |
||