| 000 | 00582nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s1992##################000#0#eng## | ||
| 020 | _a9780878496440 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a531.7 ROS | ||
| 245 |
_aTrends in ion implantation _ceditor, Marc Van Rossum |
||
| 260 |
_aZurich, Switerland _bTrans Tech Publications _cc1992 |
||
| 300 | _a[vi], 202 p. : ill. ; 25 cm. | ||
| 500 | _aIncludes bibliographical references | ||
| 650 | _aIon implantation | ||
| 700 | _aRossum, Marc Van | ||
| 990 | _a98b46543ac10000c4187a17dd12aefb0 | ||
| 991 | _a104272 | ||
| 999 |
_c82975 _d82975 |
||