000 00575nam a2200169 4500
005 20260315194350.0
008 260315b |||||||| |||| 00| 0 eng d
020 _a9780878496549
_qpbk
041 _aeng
082 _a621.3815
_bTAG
100 _aTaguchi, Tsunemasa
245 _aShallow impurities in semiconductors
_cTsunemasa Tguchi
260 _aUSA
_bTrans tech publications
_c1993
300 _a528 p.: ill.: 23 c.m.
490 _aProceedings of the Fifth International Conference on Shallow impurities in Semiconductors.... Japan 5 t0 8 August 1992
942 _cREF
999 _c617761
_d617761