| 000 | 00506nam a2200193 a 4500 | ||
|---|---|---|---|
| 001 | 1763717260957 | ||
| 003 | ACL | ||
| 005 | 20251121150015.0 | ||
| 008 | 251121s2001##################000#0#eng## | ||
| 020 | _a9780819439956 | ||
| 082 | 0 | 4 |
_a621.381531 _bWON |
| 100 | 1 |
_aWong, Alfred Kwok-Kit, _eauthor. |
|
| 245 | 1 | 0 | _aResolution Enhancement Techniques in Optical Lithography : |
| 260 |
_bSPIE Press, _c2001. |
||
| 300 | _a238 pages | ||
| 650 | 0 | _aScience. | |
| 942 | _cENGLISH | ||
| 040 |
_aACL _beng _cACL |
||
| 999 |
_c598320 _d598320 |
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