| 000 | 00506nam a2200193 a 4500 | ||
|---|---|---|---|
| 001 | 1763642709995 | ||
| 003 | ACL | ||
| 005 | 20251120181856.0 | ||
| 008 | 251120s1997##################000#0#eng## | ||
| 020 | _a9780306450549 | ||
| 082 | 0 | 4 |
_a621.38152 _bBOR |
| 100 | 1 |
_aBorisenko, Victor E., _eauthor. |
|
| 245 | 1 | 0 | _aRapid Thermal Processing of Semiconductors : |
| 260 |
_bBoom Koninklijke Uitgevers, _c1997. |
||
| 300 | _a384 pages | ||
| 650 | 0 | _aScience. | |
| 942 | _cENGLISH | ||
| 040 |
_aACL _beng _cACL |
||
| 999 |
_c598192 _d598192 |
||