| 000 | 00446nam a2200181 a 4500 | ||
|---|---|---|---|
| 001 | 1763630815056 | ||
| 003 | ACL | ||
| 005 | 20251120145848.0 | ||
| 008 | 251120s1999##################000#0#eng## | ||
| 020 | _a9780819434685 | ||
| 082 | 0 | 4 |
_a621.381531 _bABB.3873 |
| 245 | 1 | 0 | _aAnnual Symposium on Photomask Technology : |
| 260 | _c1999. | ||
| 300 | _a502 pages | ||
| 650 | 0 | _aIntegrated circuits. | |
| 942 | _cENGLISH | ||
| 040 |
_aACL _beng _cACL |
||
| 999 |
_c598177 _d598177 |
||