000 00846nam a22002177a 4500
005 20251004141516.0
008 251004b |||||||| |||| 00| 0 eng d
020 _a9780819465764
_qpbk.
041 _aeng
082 _a621.381
_bHAR
100 _aHartzell, Allyson L. ; Ramesham, Rajeshuni
245 _aReliability, Packaging, Testing, And Characterization Of Mems/moems Vi : 23-24 January, 2007, San Jose, California, Usa
_c/ edited by Allyson L. Hartzell, Rajeshuni Ramesham
250 _a1st ed.
260 _aBellingham
_bSpie
_cc2007
300 _aix, (various pagings)
_b: ill.
_c; 29 cm.
490 _aProceedings of SPIE--the International Society for Optical Engineering,
_vv. 6463
504 _aindex
650 _aMicroelectromechanical Systems Reliability Congresses
650 _aMicroelectronic packaging
942 _cREF
999 _c590779
_d590779