000 00566nam a2200193 a 4500
001 1759490534837
003 ACL
005 20251003165700.0
008 251003s2009##################000#0#eng##
020 _a9780819475442
082 0 4 _a681.42
_bHAN
100 1 _aHan, Sen,
_eauthor.
245 1 0 _aDesign, Manufacturing, and Testing of Micro- and Nano-optical Devices and Systems :
260 _bSPIE-International Society for Optical Engineering,
_c2009.
300 _a248 pages
650 0 _aOptical instruments.
942 _cENGLISH
040 _aACL
_beng
_cACL
999 _c590597
_d590597