| 000 | 00505nam a2200193 a 4500 | ||
|---|---|---|---|
| 001 | 1759489017323 | ||
| 003 | ACL | ||
| 005 | 20251003163101.0 | ||
| 008 | 251003s2007##################000#0#eng## | ||
| 020 | _a9780819467171 | ||
| 082 | 0 | 4 |
_a621 _bBEC |
| 100 | 1 |
_aBecker, Thomas, _eauthor. |
|
| 245 | 1 | 0 | _aSmart Sensors, Actuators, and MEMS III : |
| 260 |
_bSociety of Photo Optical, _c2007. |
||
| 300 | _a536 pages | ||
| 650 | 0 | _aTechnology & Engineering. | |
| 942 | _cENGLISH | ||
| 040 |
_aACL _beng _cACL |
||
| 999 |
_c590564 _d590564 |
||