| 000 | 00527nam a2200181 a 4500 | ||
|---|---|---|---|
| 001 | 1759487720713 | ||
| 003 | ACL | ||
| 005 | 20251003160657.0 | ||
| 008 | 251003s2009##################000#0#eng## | ||
| 020 | _a9780819478962 | ||
| 082 | 0 | 4 |
_a681.4 _bZHO |
| 245 | 1 | 0 | _a2009 International Conference on Optical Instruments and Technology : |
| 260 |
_bSPIE-International Society for Optical Engineering, _c2009. |
||
| 300 | _a194 pages | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 942 | _cENGLISH | ||
| 040 |
_aACL _beng _cACL |
||
| 999 |
_c590473 _d590473 |
||