000 00815nam a2200253Ia 4500
008 191130s1995##################000#0#eng##
020 _a9780792334583
022 _a95011665
040 _aACL
_cACL
082 _a620.44 PAU
245 _aMaterials and processes for surface and interface engineering
_cedited by Yves Pauleau
260 _aDordrecht ; Boston
_bKluwer Academic Publishers
_c1995
300 _axiii, 646 p. : ill. ; 25 cm
500 _aIncludes bibliographical references and index
650 _aInterfaces (Physical sciences)
650 _aPlasma-enhanced chemical vapor deposition
650 _aSurfaces (Technology)
650 _aThin films
650 _aVapor plating
700 _aPauleau, Yves
990 _aacf706b8ac10000c382cf3118bad51d6
991 _a108718
999 _c5310
_d5310