000 | 00815nam a2200253Ia 4500 | ||
---|---|---|---|
008 | 191130s1995##################000#0#eng## | ||
020 | _a9780792334583 | ||
022 | _a95011665 | ||
040 |
_aACL _cACL |
||
082 | _a620.44 PAU | ||
245 |
_aMaterials and processes for surface and interface engineering _cedited by Yves Pauleau |
||
260 |
_aDordrecht ; Boston _bKluwer Academic Publishers _c1995 |
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300 | _axiii, 646 p. : ill. ; 25 cm | ||
500 | _aIncludes bibliographical references and index | ||
650 | _aInterfaces (Physical sciences) | ||
650 | _aPlasma-enhanced chemical vapor deposition | ||
650 | _aSurfaces (Technology) | ||
650 | _aThin films | ||
650 | _aVapor plating | ||
700 | _aPauleau, Yves | ||
990 | _aacf706b8ac10000c382cf3118bad51d6 | ||
991 | _a108718 | ||
999 |
_c5310 _d5310 |