| 000 | 01248nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2000##################000#0#eng## | ||
| 020 | _a9780819438317 | ||
| 022 | _a2001267484 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a671.35 VLA | ||
| 245 |
_aMaterials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA _cYuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA) |
||
| 260 |
_aBellingham, WA _bSPIE _cc2000 |
||
| 300 | _aix, 200 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aElectromechanical devices - Congresses | ||
| 650 | _aMicromachining - Congresses | ||
| 650 | _aMicromechanics - Congresses | ||
| 700 | _aCoane, Philip J | ||
| 700 | _aVladimirsky, Yuli | ||
| 710 | _aSandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) | ||
| 990 | _aa76cfed5ac10000c25fe60032e056c62 | ||
| 991 | _a342436 | ||
| 999 |
_c5300 _d5300 |
||