| 000 | 00734nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 210417s9999 xx 000 0 und d | ||
| 020 | _a9781781546994 | ||
| 020 | _b1781546991 | ||
| 082 | _a620.5 JIA : 2 | ||
| 082 | _b22.620.5 JIA : 0.1 | ||
| 245 | 0 | _aEncyclopaedia of manufacturing techniques for microfabrication adn nanotechnology | |
| 245 | 0 | _cEncyclopaedia of manufacturing techniques for microfabrication adn nanotechnology | |
| 250 | _b"4v.(x, 286 p. ; xii, 288 p. ; x, 261 p. ; vi, 252 p.) : ill. ; 24 cm., hbk." | ||
| 260 | _aUnited Kingdom | ||
| 260 | _baurisreference ltd | ||
| 260 | _c2016 | ||
| 700 | _a"Jiang, Guomin" | ||
| 700 | _b"Contributors Guomin Jiang, Jonathan Lueke, Koen Beumer, H. Bonyan, et al." | ||
| 999 |
_c485087 _d485087 |
||