| 000 | 01096nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s1997##################000#0#eng## | ||
| 020 | _a9783908450276 | ||
| 022 | _a99221384 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a537.622 CLA | ||
| 245 |
_aProceedings of the 7th international autumn meeting gettering and defect engineering in semiconductor technology : GADEST '97, Spa, Belgium, October 5-10, 1997 _ceditors, and C. Claeys ... [et al.] |
||
| 260 |
_aZurich ; Enfield, N.H _bScitec Pub. Ltd. ; Trans Tech Pub. Ltd. [distributor] _c[1997] |
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| 300 | _axv, 538 p. : ill. ; 25 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aElectrical engineering - Materials - Congresses | ||
| 650 | _aGetters - Congresses | ||
| 650 | _aSemiconductors - Congresses | ||
| 650 | _aSilicon crystals - Defects - Congresses | ||
| 700 | _aClaeys, Cor L | ||
| 710 | _aInternational Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (7th : 1997 : Spa, Belgium) | ||
| 990 | _afd7c1154ac10000c0b8e6c11a43b619a | ||
| 991 | _a385740 | ||
| 999 |
_c44517 _d44517 |
||