000 00498nam a2200169Ia 4500
008 191130s2005##################000#0#eng##
020 _a9788181288530
040 _aACL
_cACL
082 _a620.5 SAN
100 _aSantos, Hector J De Los
245 _aPrinciples and applications of nano MEMS physics
_cHector J De Los Santos
260 _aNew Delhi
_b[publisher not identified]
_cc2005
300 _axv,254p
990 _aae03f2beac10000c4a9ab212251c3038
991 _a109240
999 _c43168
_d43168