| 000 | 01007nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s1994##################000#0#eng## | ||
| 020 | _a9780841230552 | ||
| 022 | _a94038922 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 ITO | ||
| 245 |
_aPolymeric materials for microelectronic applications : science and technology _cHiroshi Ito, editor, Seiichi Tagawa, editor, Kazuyuki Horie, editor |
||
| 260 |
_aWashington, DC _bAmerican Chemical Society _c1994 |
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| 300 | _aix, 468 p. : ill. ; 24 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aMicroelectronics - Materials - Congresses | ||
| 650 | _aPolymers - Congresses | ||
| 700 | _aHorie, Kazuyuki | ||
| 700 | _aIto, Hiroshi | ||
| 700 | _aTagawa, Seichi | ||
| 710 | _aAmerican Chemical Society. Division of Polymeric Materials: Science and Engineering, KÅbunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group | ||
| 990 | _a00256462ac10000c36613240371b4d76 | ||
| 991 | _a134567 | ||
| 999 |
_c39747 _d39747 |
||