| 000 | 01146nam a2200289Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2007##################000#0#eng## | ||
| 020 | _a9780819468529 | ||
| 022 | _a2009281699 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a681.25 ASS | ||
| 245 |
_aAdvances in metrology for x-ray and EUV optics II : 30 August 2007, San Diego, California, USA _cLahsen Assoufid, Peter Z. Takacs, Masaru Ohtsuka, editors, ; sponsored and published by SPIE |
||
| 260 |
_aBellingham, Wash _bSPIE _cc2007 |
||
| 300 | _a1 v. (various pagings) : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and author index | ||
| 650 | _aLaser interferometers - Congresses | ||
| 650 | _aMeasurement - Congresses | ||
| 650 | _aMeasuring instruments - Design and construction - Congresses | ||
| 650 | _aOptical instruments - Design and construction - Congresses | ||
| 650 | _aOptical measurements - Congresses | ||
| 700 | _aAssoufid, Lahsen | ||
| 700 | _aOhtsuka, Masaru | ||
| 700 | _aTakacs, Peter Z | ||
| 710 | _aSociety of Photo-optical Instrumentation Engineers | ||
| 990 | _aab91c9b3ac10000c1b1e52e1bfd8eb1c | ||
| 991 | _a344040 | ||
| 999 |
_c363449 _d363449 |
||