| 000 | 01367nam a2200277Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2005##################000#0#eng## | ||
| 020 | _a9780819456007 | ||
| 022 | _a2005299112 | ||
| 040 |
_aACL _cACL |
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| 082 | _a621.381531 WAN | ||
| 245 |
_aAdvanced microlithography technologies : 8-10 November, 2004, Beijing, China _cYangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors, ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.] |
||
| 260 |
_aBellingham, Wash _bSPIE _cc2005 |
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| 300 | _axi, 380 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and author index | ||
| 650 | _aIntegrated circuits - Masks - Congresses | ||
| 650 | _aManufacturing processes - Congresses | ||
| 650 | _aMicrolithography - Congresses | ||
| 650 | _aX-ray lithography - Congresses | ||
| 700 | _aProgler, Christopher J | ||
| 700 | _aWang, Yangyuan | ||
| 700 | _aYao, Jun'en | ||
| 710 | _aAustralian Optical Society, Guo jia zi ran ke xue ji jin wei yuan hui (China), Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui | ||
| 990 | _ae9ea84aeac10000c05c4a976c857a9ad | ||
| 991 | _a377174 | ||
| 999 |
_c362804 _d362804 |
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