| 000 | 01308nam a2200277Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2000##################000#0#eng## | ||
| 020 | _a9780819438997 | ||
| 022 | _a2001273204 | ||
| 040 |
_aACL _cACL |
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| 082 | _a621.38152 HAR | ||
| 245 |
_aAdvanced microelectronic processing techniques : 28-30 November 2000, Singapore _cH. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors, ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] |
||
| 260 |
_aBellingham, Wash _bSPIE _cc2000 |
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| 300 | _axix, 212 p. : ill. ; 28 cm | ||
| 500 | _aErrata p. tipped in. Includes bibliographical references and index | ||
| 650 | _aEpitaxy - Congresses | ||
| 650 | _aIntegrated circuits - Design and construction - Congresses | ||
| 650 | _aSemiconductor wafers - Congresses | ||
| 650 | _aSemiconductors - Characterization - Congresses | ||
| 700 | _aGupta, Subhash | ||
| 700 | _aHarrison, H. Barry | ||
| 700 | _aWee, Andrew T. S | ||
| 710 | _aInstitute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers | ||
| 990 | _adeb3d9a5ac10000c4b436e7f3b7795e9 | ||
| 991 | _a370746 | ||
| 999 |
_c362803 _d362803 |
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