000 01186nam a2200265Ia 4500
008 191130s2002##################000#0#eng##
020 _a9780819445469
022 _a2003535275
040 _aACL
_cACL
082 _a621.36 DOP
245 _aAdvanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002, Seattle, Washington, USA
_cAngela Duparré, Bhanwar Singh, chairs/editors, ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company (USA) ... [et al.]
260 _aBellingham, Wash
_bSPIE
_cc2002
300 _aviii, 192 p. : ill. ; 28 cm
500 _aIncludes bibliographical references and index
650 _aInformation storage and retrieval systems - Congresses
650 _aMetrology - Congresses
650 _aOptical materials - Congresses
650 _aSemiconductors - Characterization - Congresses
700 _aDuparré, Angela
700 _aSingh, Bhanwar
710 _aBoeing Company, Society of Photo-optical Instrumentation Engineers
990 _afd595e29ac10000c6edb5ca32fe0168d
991 _a385546
999 _c362547
_d362547