000			00686nam a2200217Ia 4500
008			191130s2009##################000#0#eng##
020			_a9781420045680
022			_a2008301219
040			_aACL _cACL
082			_a621.381 LIU
100			_aLiu, Ai-Qun
245			_aPhotonic MEMS devices : design, fabrication and control _cAi-Qun Liu ; co-authors, Xuming Zhang ... [et al.]
260			_aBoca Raton, FL _bCRC Press _c2009
300			_a483 p. : ill. ; 27 cm
500			_aIncludes bibliographical references and index
650			_aMicroelectromechanical systems
650			_aPhotonics
990			_a18cb1d40ac10000c08852ef57d15e1e4
991			_a143546
999			_c35883 _d35883