| 000 | 01200nam a2200277Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2001##################000#0#eng## | ||
| 020 | _a9780819441638 | ||
| 022 | _a2002280022 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381045 DUP | ||
| 245 |
_aOptical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, USA _cAngela Duparré, Bhanwar Singh, chairs/editors ; sponsored... by SPIE--the International Society for Optical Engineering |
||
| 260 |
_aBellingham, WA _bSPIE _cc2001 |
||
| 300 | _aix, 294 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aInformation retrieval - Technological innovations - Congresses | ||
| 650 | _aOptical measurements - Industrial applications - Congresses | ||
| 650 | _aOptoelectronic devices - Industrial applications - Congresses | ||
| 650 | _aOptoelectronics - Congresses | ||
| 650 | _aSurfaces (Technology) - Measurement - Congresses | ||
| 700 | _aDuparré, Angela | ||
| 700 | _aSingh, Bhanwar | ||
| 710 | _aSociety of Photo-optical Instrumentation Engineers | ||
| 990 | _ad9f98e2aac10000c71784f9c86629818 | ||
| 991 | _a368329 | ||
| 999 |
_c27951 _d27951 |
||