| 000 | 00490nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2002##################000#0#eng## | ||
| 020 | _a9780070487093 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 HSU | ||
| 100 | _aHsu, Tai-Ran | ||
| 245 |
_aMEMS & microsystems _cTai-Ran Hsu |
||
| 260 |
_aNew Delhi _bTata McGraw-Hill _c2002 |
||
| 300 | _axii, 436 p. : ill. ; 24 cm | ||
| 500 | _aIncludes index | ||
| 990 | _a03dd70f1ac100b4650cb205e29ba979c | ||
| 991 | _a449848 | ||
| 999 |
_c273555 _d273555 |
||