| 000 | 00561nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2016##################000#0#eng## | ||
| 020 | _a9788131764756 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.3 LIU | ||
| 100 | _aLiu, Chang | ||
| 245 |
_aFoundations of MEMS _cChang Liu |
||
| 250 | _a2nd ed | ||
| 260 |
_aNew Delhi _bPearson _c2016 |
||
| 300 | _a576 p. : ill. ; 25x19 cm | ||
| 500 | _aSixth Impression. Includes index | ||
| 650 | _aMicroelectromechanical systems | ||
| 990 | _ad023cbbdac100b4518b72348ec3b62ef | ||
| 991 | _a454994 | ||
| 999 |
_c263629 _d263629 |
||