| 000 | 00635nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2008##################000#0#eng## | ||
| 020 | _a9780444521927 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 GIA | ||
| 245 |
_aComprehensive microsystems _ceditors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe |
||
| 260 |
_aAmsterdam _bElsevier _c2008 |
||
| 300 | _a3 v. : ill. (some col.) ; 27 cm | ||
| 650 | _aMicroelectromechanical systems | ||
| 700 | _aGianchandani, Yogesh B | ||
| 700 | _aTabata, Osamu | ||
| 700 | _aZappe, Hans P | ||
| 990 | _a19a437bfac10000c192a3fd796f76646 | ||
| 991 | _a144558 | ||
| 999 |
_c252568 _d252568 |
||