| 000 | 00554nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2006##################000#0#eng## | ||
| 020 | _a9780819461964 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381531 LIN | ||
| 100 | _aLin, Quinghuang | ||
| 245 |
_aAdvances in resist technology and processing XXIII 20-22 February, 2006, San Jose, California, USA _cQinghuang Lin |
||
| 260 |
_aCalifornia _bThe International Society _c2006 |
||
| 650 | _aMicrolithography | ||
| 990 | _aea4fd72bac10000c5172abfd766a5831 | ||
| 991 | _a377509 | ||
| 999 |
_c240695 _d240695 |
||