| 000 | 00754nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s1997##################000#0#eng## | ||
| 020 | _a0819423785 | ||
| 022 | _a96040237 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a670 CHO | ||
| 245 |
_aHandbook of microlithography, micromachining, and microfabrication _cP. Rai-Choudhury, editor |
||
| 260 |
_aBellingham, WA _bInstitution of Electrical Engineers, SPIE Optical Engineering Press _cc1997 |
||
| 300 | _a768 p. : ill. ; 26 cm | ||
| 500 | _aIncludes bibliographical references and indexes | ||
| 650 | _aMicrofabrication | ||
| 650 | _aMicrolithography | ||
| 650 | _aMicromachining | ||
| 700 | _aRai-Choudhury, P | ||
| 990 | _a07c30b72ac10000c1d9ff30bbf378cec | ||
| 991 | _a265344 | ||
| 999 |
_c238496 _d238496 |
||