000			01172nam a2200205Ia 4500
008			191130s2002##################000#0#eng##
020			_a9780819445315
040			_aACL _cACL
082			_a621.3815 BEH
245			_a18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany _cUwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ..[et al. ; published by SPIE--The International Society for Optical Engineering]
260			_aBellingham, WA _bSPIE _cc2002
300			_axiii, 256 p. : ill. ; 28 cm.
500			_aIncludes bibliographical references and index
650			_aIntegrated circuits - Masks - Congresses
650			_aMicrolithography - Congresses
700			_aBehringer, Uwe F. W
710			_aEuropean Conference on Mask Technology for Integrated Circuits and Microcomponents (18th : 2002 : Munich, Germany), Society of Photo-optical Instrumentation Engineers, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
990			_ad046e7a5ac10000c7b59e3d5b7e66021
999			_c236624 _d236624