| 000 | 01208nam a2200265Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2000##################000#0#eng## | ||
| 020 | _a9780819435507 | ||
| 022 | _a2001266844 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381 HEL | ||
| 245 |
_aLaser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA _cHenry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering |
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| 260 |
_aBellingham, WA _bSPIE _cc2000 |
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| 300 | _axi, 514 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aLaser ablation - Congresses | ||
| 650 | _aLasers - Industrial applications - Congresses | ||
| 650 | _aManufacturing processes - Congresses | ||
| 650 | _aMicroelectronics industry - Equipment and supplies - Congresses | ||
| 650 | _aOptoelectronic devices - Design and construction - Congresses | ||
| 700 | _aHelvajian, Henry | ||
| 710 | _aSociety of Photo-optical Instrumentation Engineers, United States. Air Force | ||
| 990 | _ade64882bac10000c19ab2df2454d27d7 | ||
| 991 | _a370206 | ||
| 999 |
_c228772 _d228772 |
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