| 000 | 00890nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2008##################000#0#eng## | ||
| 020 | _a9780470058619 | ||
| 022 | _a2007050172 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621 GER | ||
| 100 | _aGerlach, Gerald | ||
| 245 |
_aIntroduction to microsystem technology : a guide for students _cGerald Gerlach, Wolfram Dotzel ; translated by Dorte Muller |
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| 260 |
_aChichester, England ; Hoboken, NJ _bJ. Wiley & Sons _cc2008 |
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| 300 | _axxiii, 351 p. : ill. ; 26 cm | ||
| 500 | _aIncludes bibliographical references and index. Translated from the German | ||
| 650 | _aMicroelectromechanical systems - Design and construction | ||
| 650 | _aMicroelectronics | ||
| 650 | _aSystem design | ||
| 700 | _aDötzel, Wolfram | ||
| 700 | _aMuller, Dorte | ||
| 990 | _ad1a6fa8bac10000c3bf41ffffa72dbaa | ||
| 991 | _a117168 | ||
| 999 |
_c219747 _d219747 |
||