| 000 | 00721nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2002##################000#0#eng## | ||
| 020 | _a9780201444940 | ||
| 022 | _a2002276015 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.395 JAE | ||
| 100 | _aJaeger, Richard C | ||
| 245 |
_aIntroduction to microelectronic fabrication _cRichard C. Jaeger |
||
| 250 | _a2nd ed | ||
| 260 |
_aUpper Saddle River, NJ _bPrentice Hall _c2002 |
||
| 300 | _axiv, 316 p. : ill. ; 24 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aIntegrated circuits - Very large scale integration - Design and construction - Textbooks | ||
| 990 | _a71d42144ac10000c7d310ce9f3bac63f | ||
| 991 | _a186962 | ||
| 999 |
_c219740 _d219740 |
||