| 000 | 00596nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2003##################000#0#eng## | ||
| 020 | _a9780125112215 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.38152 MUR | ||
| 245 |
_aInterlayer dielectrics for semiconductor technologies _cedited by S P Murarka,Eizenberg M and Sinha A K |
||
| 260 |
_aAmsterdam ; Boston _bElsevier, Elsevier / Academic Press _c2003 |
||
| 300 | _axiv,444p | ||
| 700 | _aEizenberg, M | ||
| 700 | _aMurarka, S P | ||
| 700 | _aSinha A K | ||
| 990 | _a3d7d5a52ac10000c363def3302f5890e | ||
| 991 | _a157448 | ||
| 999 |
_c217375 _d217375 |
||