| 000 | 01069nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2009##################000#0#eng## | ||
| 020 | _a9780819476951 | ||
| 022 | _a2010286669 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a620.5 POS | ||
| 245 |
_aInstrumentation, metrology, and standards for nanomanufacturing III : 3-5 August 2009, San Diego, California, United States _cMichael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, NIST--National Institute of Standards and Technology (United States) |
||
| 260 |
_aBellingham, WA _bSPIE _c2009 |
||
| 300 | _aix, 1 v. (various pagings) : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aMicrofabrication - Congresses | ||
| 650 | _aNanostructured materials - Congresses | ||
| 650 | _aNanotechnology - Congresses | ||
| 700 | _aAllgair, John A | ||
| 700 | _aPostek, Michael T | ||
| 710 | _aNational Institute of Standards and Technology (U.S.), SPIE (Society) | ||
| 990 | _ae401fc24ac10000c6485200c61a9795f | ||
| 991 | _a373517 | ||
| 999 |
_c216326 _d216326 |
||