| 000 | 00713nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2008##################000#0#eng## | ||
| 020 | _a9780815515548 | ||
| 022 | _a2007037151 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.38152 REI | ||
| 245 |
_aHandbook of silicon wafer cleaning technology _cedited by Karen A. Reinhardt, Werner Kern |
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| 250 | _a2nd ed | ||
| 260 |
_aNorwich, NY _bWilliam Andrew _c2008 |
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| 300 | _axxvi, 718 p. : ill. ; 24 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aSilicon-on-insulator technology | ||
| 700 | _aKern, Werner | ||
| 700 | _aReinhardt, Karen A | ||
| 990 | _a4d71ef25ac10000c1933e9a5aed8a2a5 | ||
| 991 | _a166228 | ||
| 999 |
_c201055 _d201055 |
||