| 000 | 00805nam a2200265Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2000##################000#0#eng## | ||
| 020 | _a9783540667728 | ||
| 022 | _a38824 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.044 SHU | ||
| 100 | _aShul, R. J | ||
| 245 |
_aHandbook of advanced plasma processing techniques _cR.J. Shul, S.J. Pearton (eds.) |
||
| 260 |
_aBerlin _bSpringer _cc2000 |
||
| 300 | _axvi, 653 p. : ill. ; 24 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aElectronic circuits | ||
| 650 | _aIntegrated circuits - Design and construction | ||
| 650 | _aPlasma engineering | ||
| 650 | _aPlasma etching | ||
| 650 | _aPlasma spraying | ||
| 700 | _aPearton, S. J | ||
| 990 | _acb7b8917ac10000c47ce4306ab010d76 | ||
| 991 | _a66483 | ||
| 999 |
_c199888 _d199888 |
||