| 000 | 00985nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2005##################000#0#eng## | ||
| 020 | _a9783908451136 | ||
| 022 | _a2006276632 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.38152 PIC | ||
| 245 |
_aGettering and defect engineering in semiconductor technology XI : GADEST 2005 : proceedings of the 11th international autumn meeting : Giens, France, September 25-30, 2005 _cedited by B. Pichaud . . . [et al. ] |
||
| 260 |
_aZurich, Switerland _bTrans Tech Publications _c2005 |
||
| 300 | _axvi, 814 p. : ill. ; 25 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aGetters - Congresses | ||
| 650 | _aSemiconductors - Defects - Congresses | ||
| 650 | _aSemiconductors - Materials - Congresses | ||
| 650 | _aSilicon crystals - Congresses | ||
| 700 | _aPichaud, B | ||
| 710 | _aGADEST 2005 (2005 : Giens, France) | ||
| 990 | _a3e830cbeac10000c1b5764e665b42190 | ||
| 991 | _a158823 | ||
| 999 |
_c194171 _d194171 |
||