| 000 | 00717nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2007##################000#0#eng## | ||
| 020 | _a9780521831994 | ||
| 022 | _a2007300349 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a624.17723 YAO | ||
| 245 |
_aFocused ion beam systems : basics and applications _cedited by Nan Yao |
||
| 260 |
_aCambridge _bCambridge University Press _c2007 |
||
| 300 | _axi, 395 p. : ill. ; 26 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aFocused ion beams | ||
| 650 | _aFocused ion beams - Industrial applications | ||
| 650 | _aIon bombardment | ||
| 700 | _aYao, Nan | ||
| 990 | _aba8de325ac10000c43a36e90900e48f6 | ||
| 991 | _a229276 | ||
| 999 |
_c185758 _d185758 |
||