| 000 | 00856nam a2200241Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2009##################000#0#eng## | ||
| 020 | _a9781420059113 | ||
| 022 | _a2008051282 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.38152 PAI | ||
| 100 | _aPaik, Ungyu | ||
| 245 |
_aNanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices _cUngyu Paik, Jea-Gun Park |
||
| 260 |
_aBoca Raton, FL _bCRC Press/Taylor & Francis Group _c2009 |
||
| 300 | _axiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cm | ||
| 500 | _aIncludes bibliographical references (p. 171-175) and index | ||
| 650 | _aChemical mechanical planarization | ||
| 650 | _aNanoelectronics | ||
| 650 | _aNanoparticles | ||
| 700 | _aPark, Jea-Gun | ||
| 990 | _a3442b0c6ac10000c3ef576d1cb176d53 | ||
| 991 | _a153278 | ||
| 999 |
_c18499 _d18499 |
||