| 000 | 00638nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2007##################000#0#eng## | ||
| 020 | _a9780819466365 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.381531 LER | ||
| 100 | _aLercel, Michael J | ||
| 245 |
_aEmerging lithographic technologies XI 27 February-1 march 2007, San Jose, California, USA _cMichael J.Lercel |
||
| 260 |
_aCalifornia _bSPIE - Proceeding _c2007 |
||
| 300 | _avarious pagings. ; 30 cm | ||
| 650 | _aLithography, Electron beam | ||
| 650 | _aLithography--Industrial applications | ||
| 990 | _ac9dea049ac10000c41b08ab253ec344e | ||
| 991 | _a360422 | ||
| 999 |
_c159678 _d159678 |
||