000			01155nam a2200265Ia 4500
008			191130s2006##################000#0#eng##
020			_a9780819461988
022			_a2007296712
040			_aACL _cACL
082			_a629.895 EMA
100			_aEmami, Iraj
245			_aData analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA _cIraj Emami, Kenneth W. Tobin, Jr. ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc
260			_aBellingham, WA _bSPIE _cc2006
300			_a1 v. (in various pagings) : ill. ; 28 cm
500			_aIncludes bibliographical references and author index
650			_aIntelligent control systems - Mathematical models - Congresses
650			_aManufacturing processes - Automatic control - Congresses
650			_aManufacturing processes - Mathematical models - Congresses
650			_aProcess control - Mathematical models - Congresses
700			_aTobin, Kenneth W
710			_aInternational SEMATECH
990			_abfcd4fb3ac10000c683f6d18cba355c7
991			_a355459
999			_c144808 _d144808