| 000 | 00797nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2004##################000#0#eng## | ||
| 020 | _a9781402076886 | ||
| 022 | _a2003065275 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.38152 FOR | ||
| 100 | _aFortin, Jeffrey B | ||
| 245 |
_aChemical vapor deposition polymerization : the growth and properties of parylene thin films _cby Jeffrey B. Fortin, Toh-Ming Lu |
||
| 260 |
_aDeventer, The Netherlands ; Boston, MA _bKluwer Academic Publishers _cc2004 |
||
| 300 | _axvi, 102 p. : ill. ; 24 cm | ||
| 500 | _aIncludes bibliographical references (p. [91]-99) and index | ||
| 650 | _aChemical vapor deposition | ||
| 650 | _aThin films | ||
| 700 | _aLu, T. -M | ||
| 990 | _a05cdd136ac10000c529dba092a1b80af | ||
| 991 | _a262473 | ||
| 999 |
_c127337 _d127337 |
||