000 00828nam a2200253Ia 4500
008 191130s1999##################000#0#eng##
020 _a9780792385912
022 _a99037208
040 _aACL
_cACL
082 _a621.3815 SUN
100 _aJu, Y. Sungtaek
245 _aMicroscale heat conduction in integrated circuits and their constituent films
_cby Y. Sungtaek Ju, Kenneth E. Goodson
260 _aDordrecht ; Boston
_bKluwer Academic
_c1999
300 _axii, 102 p. : ill. ; 24 cm
500 _aIncludes bibliographical references
650 _aHeat - Transmission
650 _aSemiconductors - Cooling
650 _aSilicon-on-insulator technology
650 _aThin film transistors
700 _aGoodson, Kenneth E
990 _a3d306bf3ac10000c453e15a985ff1cd9
991 _a157000
999 _c10331
_d10331