| 000 | 01616nam a2200301Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2005##################000#0#eng## | ||
| 020 | _a9780819456946 | ||
| 022 | _a2005296016 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a621.36 JON | ||
| 245 |
_aMicromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA _cEric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA) |
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| 260 |
_aBellingham, WA _bSPIE _cc2005 |
||
| 300 | _axl, 282 p. : ill. ; 28 cm | ||
| 500 | _aFirst conference has title: Micromachining technology for micro-optics. Includes bibliographical references and author index | ||
| 650 | _aIntegrated optics - Congresses | ||
| 650 | _aMicroelectromechanical systems - Congresses | ||
| 650 | _aMicromachining - Congresses | ||
| 650 | _aMiniature electronic equipment - Design and construction - Congresses | ||
| 650 | _aOptoelectronic devices - Design and construction - Congresses | ||
| 650 | _aVictoria and Albert Museum | ||
| 700 | _aJohnson, Eric G | ||
| 700 | _aNordin, Gregory P | ||
| 700 | _aSuleski, Thomas J | ||
| 710 | _aSandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) | ||
| 990 | _a027105f7ac10000c4ef7c3b7d92848fa | ||
| 991 | _a388199 | ||
| 999 |
_c10252 _d10252 |
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