| 000 | 01215nam a2200253Ia 4500 | ||
|---|---|---|---|
| 008 | 191130s2000##################000#0#eng## | ||
| 020 | _a9780819438324 | ||
| 022 | _a2001267697 | ||
| 040 |
_aACL _cACL |
||
| 082 | _a620.5 PEE | ||
| 245 |
_aMicromachined devices and components VI : 18-19 September 2000, Santa Clara, USA _cEric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA) |
||
| 260 |
_aBellingham, WA _bSPIE _cc2000 |
||
| 300 | _aviii, 282 p. : ill. ; 28 cm | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aElectromechanical devices - Congresses | ||
| 650 | _aMicromachining - Congresses | ||
| 650 | _aMicromechanics - Congresses | ||
| 700 | _aPaul, Oliver | ||
| 700 | _aPeeters, Eric | ||
| 710 | _aSandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) | ||
| 990 | _aea121199ac10000c6e0c122258d1a55f | ||
| 991 | _a377311 | ||
| 999 |
_c10237 _d10237 |
||